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Lawrence Berkeley National Laboratory
University of California
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In-Situ observation of wet oxidation kinetics on Si (100) via ambient pressure x-ray photoemission spectroscopy
Massimiliano Rossi

Download the Paper (5.4 MB, PDF file) - September 5, 2008 Tell a colleague about it.
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ABSTRACT:

SUGGESTED CITATION:
Massimiliano Rossi, " In-Situ observation of wet oxidation kinetics on Si (100) via ambient pressure x-ray photoemission spectroscopy " (September 5, 2008). Lawrence Berkeley National Laboratory. Paper LBNL-873E.
http://repositories.cdlib.org/lbnl/LBNL-873E

 
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