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T.W. Zhang, S. Boyd, A. Vijayaraghavan, and D. Dornfeld; "Energy Use in Nanoscale Manufacturing; " Proceedings of the 2006 IEEE International Symposium on Electronics and Environment"; March, 2006; Manuscript accepted for publication.

Download the Paper (153 K, PDF file) - April 26, 2006 Tell a colleague about it. Printing Tips: Select 'print as image' in the Acrobat print dialog if you have trouble printing.

ABSTRACT:
This paper presents an overview of key nanoscale manufacturing technologies, and qualitatively examines their fundamental process requirements with respect to energy demand. The processes requirements are related to semiconductor manufacturing, where applicable, and gaps in our understanding of these processes on the production scale are identified as goals for the research community. Finally, the paper proposes a framework for the systematic analysis of energy use in nanoscale manufacturing processes.

SUGGESTED CITATION:
Teresa Zhang, Sarah Boyd, Athulan Vijayaraghavan, and David Dornfeld, "Energy Use in Nanoscale Manufacturing" (April 26, 2006). Laboratory for Manufacturing and Sustainability. Green Manufacturing Group. Paper zhang_06_1.
http://repositories.cdlib.org/lma/gmg/zhang_06_1