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Recent Advances in Mechanical Micromachining
David Dornfeld, UC Berkeley
Sangkee Min, UC Berkeley
Y. Takeuchi, Osaka University, Japan
Dornfeld, D., Min, S., and Takeuchi, Y. (2006), “Recent Advances in Mechanical Micromachining", CIRP Annals, 55, 2, pp.
ABSTRACT: This paper reviews some of the main drivers, developments and future requirements in the field of
micromanufacturing as related to the machining process from the perspective of the recent research and
development literature. For the purposes of this paper micromachining includes creation of precise two and
three dimensional workpieces with dimensions in the range of a few tens of nanometers to some few
millimeters by cutting using defined geometry cutting tools. The review includes topics of process physics,
including materials and microstructural effects, machine tools, tooling and sensing, workpiece and design
issues, software and simulation tools, and other issues, e.g. surface and edge finish, and outlook for future
developments.
SUGGESTED CITATION: David Dornfeld, Sangkee Min, and Y. Takeuchi,
"Recent Advances in Mechanical Micromachining"
(January 1, 2006).
Laboratory for Manufacturing and Sustainability.
Precision Manufacturing Group.
Paper dornfeld_06_1.
http://repositories.cdlib.org/lma/pmg/dornfeld_06_1
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